SB300前开晶圆装运盒 （FOSB）

兼容 FIMS 的 SB300 FOSB 为 300 毫米晶圆提供干净、安全的环境。

• Ultrapure polycarbonate housing is dimensionally stable resulting in lower particle generation and outgassing
• Molded-in wafer supports allow wafer location accuracy over multiple uses and minimize component interfaces, limiting particulation 
• FIMS automation minimizes exposure to human contamination and ambient environments
• Protective gasket and filter; high filter flow rate allows external air to pass through as opposed to being forced through the gasket
• Ergonomic design allows multiple ergonomic orientations, optimizing operator handling