100/150 mm 工艺晶圆盒

Designed for wafer transport, 150 mm wafer carriers address the automation, contamination, and productivity concerns of today's 150 mm (6" fabs）

• PFA construction provides universal chemical compatibility and reliability
• A variety of 194 series, 190 series, and 182 series configurations are available to conveniently and safely transport 150 mm wafer throughout the fab
• 25 wafer capacity